Published 2011 | Version v1
Miscellaneous

Damage of monocrystal silicon under exposure to power nanosecond ion beam

  • 1. Omskij Gosudarstvennyj Univ., Omsk (Russian Federation)
  • 2. Omskij Filial Inst. Fiziki Poluprovodnikov SO RAN, Omsk (Russian Federation)

Description

no abstract available

Part of:
Summaries of reports of XLI International conference on physics of interactions of charged particles with crystals

Additional details

Additional titles

Original title (Russian)
Повреждение монокристаллического кремния при воздействии мощного ионного пучка наносекундной длительности

Publishing Information

Publisher
Universitetskaya kniga
Imprint Place
Moscow (Russian Federation)
Imprint Title
Summaries of reports of XLI International conference on physics of interactions of charged particles with crystals
Imprint Pagination
211 p.
Journal Page Range
p. 105
Report number
INIS-RU--526

Conference

Title
41. International conference on physics of interaction of charged particles with crystals
Original Conference Title
XLI mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates
31 May - 2 Jun 2011
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
43014858
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
No Abstract, Conference, Numerical Data
Descriptors DEI
CARBON IONS; CRYSTAL DEFECTS; CURRENT DENSITY; EXPERIMENTAL DATA; ION BEAMS; KEV RANGE 100-1000; MICROSTRUCTURE; MONOCRYSTALS; PHYSICAL RADIATION EFFECTS; PROTON BEAMS; SILICON
Descriptors DEC
BEAMS; CHARGED PARTICLES; CRYSTAL STRUCTURE; CRYSTALS; DATA; ELEMENTS; ENERGY RANGE; INFORMATION; IONS; KEV RANGE; NUCLEON BEAMS; NUMERICAL DATA; PARTICLE BEAMS; RADIATION EFFECTS; SEMIMETALS

Optional Information

Notes
Imprint:Tezisy dokladov XLI mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami