Published April 2010 | Version v1
Journal article

An experimental verification of the compensation of length change of line scales caused by ambient air pressure

  • 1. Instruments Company, Nikon Corporation, 471 Nagaodai, Sakae, Yokohama, Kanagawa 244-8533 (Japan)
  • 2. Core Technology Center, Nikon Corporation, 276-6 Motoishikawa, Mito, Ibaraki 310-0843 (Japan)

Description

Line scales are used as a working standard of length for the calibration of optical measuring instruments such as profile projectors, measuring microscopes and video measuring systems. The authors have developed a one-dimensional calibration system for line scales to obtain a lower uncertainty of measurement. The scale calibration system, named Standard Scale Calibrator SSC-05, employs a vacuum interferometer system for length measurement, a 633 nm iodine-stabilized He–Ne laser to calibrate the oscillating frequency of the interferometer laser light source and an Abbe's error compensation structure. To reduce the uncertainty of measurement, the uncertainty factors of the line scale and ambient conditions should not be neglected. Using the length calibration system, the expansion and contraction of a line scale due to changes in ambient air pressure were observed and the measured scale length was corrected into the length under standard atmospheric pressure, 1013.25 hPa. Utilizing a natural rapid change in the air pressure caused by a tropical storm (typhoon), we carried out an experiment on the length measurement of a 1000 mm long line scale made of glass ceramic with a low coefficient of thermal expansion. Using a compensation formula for the length change caused by changes in ambient air pressure, the length change of the 1000 mm long line scale was compensated with a standard deviation of less than 1 nm

Availability note (English)

Available from http://dx.doi.org/10.1088/0957-0233/21/4/045305

Additional details

Identifiers

DOI
10.1088/0957-0233/21/4/045305;
PII
S0957-0233(10)44587-7;

Publishing Information

Journal Title
Measurement Science and Technology
Journal Volume
21
Journal Issue
4
Journal Page Range
[7 p.]
ISSN
0957-0233
CODEN
MSTCEP

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
45005375
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Descriptors DEI
ATMOSPHERIC PRESSURE; CALIBRATION; INTERFEROMETERS; LASERS; LENGTH; LIGHT SOURCES; MEASURING METHODS; THERMAL EXPANSION
Descriptors DEC
DIMENSIONS; EXPANSION; MEASURING INSTRUMENTS; RADIATION SOURCES