Theoretical analysis and simulation of fibre-top micro cantilever resonator excited optically

Theoretical analysis and simulation of bi-layered optical fibre-end micro cantilever resonators was presented in this paper. First, corresponding theoretical model is setup and the resonating frequency is given in this case; Second, the typical characteristics of the micro resonator is simulated including deflection sensitivity, cantilever dimensions and metal coating optimization; Third, the working principle of this optimized micro cantilever is discussed based on optical interference theory of Fabry-Perot cavity. By detecting the optical output of Fabry-Perot cavity resulted from the cantilever deflection, the changes of environmental parameter (such as pressure or temperature) can be measured. Comparing with the traditional optical excited micro resonators, this fibre-top micro resonator has some favourable features, such as micro size, high sensitivity and optical integration and is more interesting and meaningful.