Published March 1997
| Version v1
Journal article
Chemical structural analysis of ion-beam exposed polyimide films by means of X-ray photoelectron spectroscopy
Creators
- 1. Osaka Univ., Toyonaka (Japan). Faculty of Engineering Science
Description
Short communication
Additional details
Publishing Information
- Journal Title
- Shinku
- Journal Volume
- 40
- Journal Issue
- 3
- Journal Page Range
- p. 187-189.
- ISSN
- 0559-8516
- CODEN
- SHINAM
Conference
- Title
- 37. vacuum symposium.
- Dates
- 30 Oct - 1 Nov 1996.
- Place
- Osaka (Japan).
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 28058652
- Subject category
- S36: MATERIALS SCIENCE; S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- CHEMICAL RADIATION EFFECTS; FILMS; IMIDES; NITROGEN IONS; ORGANIC POLYMERS; OXYGEN IONS; PHOTOELECTRON SPECTROSCOPY; STRUCTURAL CHEMICAL ANALYSIS; X-RAY SPECTROSCOPY
- Descriptors DEC
- CHARGED PARTICLES; ELECTRON SPECTROSCOPY; IONS; ORGANIC COMPOUNDS; ORGANIC NITROGEN COMPOUNDS; POLYMERS; RADIATION EFFECTS; SPECTROSCOPY