Inductively Coupled Nano-Electromechanics in Flux Tunable Superconducting Resonators

The field of cavity electromechanics provides a platform to study the light matter interaction on a quantum level. To observe quantum mechanical effects a strong photon-phonon coupling is desired, preferably exceeding the microwave (MW) resonator decay. In this talk we present a hybrid system consisting of a magnetic field tunable superconducting MW resonator based on a dc-SQUID, where the latter encloses a nanomechanical string resonator. Here, the nanomechanical string displacement couples inductively to the MW resonator by changing the area of the dc-SQUID loop. The parameters of the system offer an inherently large photon-phonon coupling on the single excitation level and estimates for optimized parameters suggest a coupling rate on par with the decay rate of the MW resonator. We discuss the optomechanical coupling strength, present the device layout including its fabrication and show experimental data of the mechanical element and the superconducting circuit.