Published November 1994
| Version v1
Journal article
Computer simulation of sputtering and atomic redistribution in Hg0.8Cd0.2Te targets under Ar+ ions bombardment
Creators
- 1. Shandong Univ., Jinan (China). Dept. of Physics
- 2. Shandong Univ., Jinan (China). Inst. of Infrared Remote Sensing
Description
The sputtering of Hg0.8Cd0.2Te target by low energy Ar+ ions has been simulated by using Monte Carlo method. The simulation results show that the concentration of Hg in the surface region of the target after ion bombardment is lower than the one before ion bombardment, but in a deeper region an excess concentration of Hg is produced due to recoil implantation. The excess concentration of Hg there may act as a donor dopant diffusion source for over doping the acceptor levels in the adjacent region and turn the p-type Hg0.8Cd0.2Te into an n-type material
Additional details
Publishing Information
- Journal Title
- Chinese Physics Letters
- Journal Volume
- 11
- Journal Issue
- 11
- Journal Page Range
- p. 717-720.
- ISSN
- 0256-307X
- CODEN
- CPLEEU
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 26058421
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ARGON IONS; CADMIUM TELLURIDES; COMPUTERIZED SIMULATION; CONCENTRATION RATIO; DEPTH; ION IMPLANTATION; MERCURY; MERCURY TELLURIDES; MONTE CARLO METHOD; SPATIAL DISTRIBUTION; SPUTTERING
- Descriptors DEC
- CADMIUM COMPOUNDS; CALCULATION METHODS; CHALCOGENIDES; CHARGED PARTICLES; DIMENSIONS; DISTRIBUTION; ELEMENTS; IONS; MERCURY COMPOUNDS; METALS; SIMULATION; TELLURIDES; TELLURIUM COMPOUNDS