Design of a deflection system for ion beam focusing emerging from glow discharge ion source

In this work, an electrostatic deflection system consists of two deflection plates connected to positive voltage has been studied. It is found that the results of this study are symmetrical with the results of the study using two deflection plates connected to negative voltage. Therefore a deflection system consists of four plates for focusing ion beam emerged from the ion source in direction of the axis of the deflection system has been designed. A singly charged ion with energy varying from 500-5000 volts emerging from the ion source and entering the two deflection plates system has been investigated. The parameters which affect on the ion beam quality emerging from the ion source with different acceleration voltages and passing through a deflection system are determined . These parameters are the voltages applied to the two deflection plates, length of the two deflection plates and distance between the two deflection plates.