Dependence of the ionization degree of sputtered particles on the bombarding ion charge

An attempt is made to understand the physical cause of dependence of the sputtering coefficient on the bombarding ion charge. The analysis of the dependence is carried out within the framework of the model of shaping the charged states of flying away particles. The model is modified with account for the dependence of electron-exchange process frequencies on the local state of a surface. 7 refs., 1 fig