Published March 1987 | Version v1
Journal article Metadata-only

Refractory-Metal silicide formation with E-Beam and laser pulses

Creators

  • 1. Lecce Univ., (Italy)
  • 2. Modena Univ. (Italy)

Description

Thin films of refractory metals (Mo, Ti) have been deposited on different substrates and irradiated by pulses of electron beams (25 keV-50ns) and laser beams (Nd: verre-30ns). All the samples react with radiation intensities dependent of the substrate type. Experimental results have been analyzed with Rutherford backscattering spectroscopy of irradiated samples together with profile and evolution of temperature after annealing

Additional details

Publishing Information

Journal Title
Vide. Couches Minces
Journal Volume
42
Journal Issue
236
Series
Vide. Couches Minces.
Journal Page Range
67-69
ISSN
0042-5281
CODEN
VIDEA

Conference

Title
European colloquium on refractory metals and silicon.
Dates
24-26 Mar 1987.
Place
Aussois (France).

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
18093719
Subject category
S38: RADIATION CHEMISTRY, RADIOCHEMISTRY AND NUCLEAR CHEMISTRY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; CHEMICAL RADIATION EFFECTS; ELECTRONS; LASER RADIATION; MOLYBDENUM; MOLYBDENUM SILICIDES; NEODYMIUM LASERS; PULSES; RUTHERFORD SCATTERING; SILICON; TEMPERATURE DEPENDENCE; THIN FILMS; TITANIUM; TITANIUM SILICIDES
Descriptors DEC
AMPLIFIERS; ELASTIC SCATTERING; ELECTROMAGNETIC RADIATION; ELEMENTARY PARTICLES; ELEMENTS; EQUIPMENT; FERMIONS; FILMS; HEAT TREATMENTS; LASERS; LEPTONS; METALS; MOLYBDENUM COMPOUNDS; RADIATION EFFECTS; RADIATIONS; SCATTERING; SEMIMETALS; SILICIDES; SILICON COMPOUNDS; SOLID STATE LASERS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS