Dual surface interferometer
Creators
Description
A double-pass interferometer is provided which allows direct measurement of relative displacement between opposed surfaces. A conventional plane mirror interferometer may be modified by replacing the beam-measuring path cube-corner reflector with an additional quarter-wave plate. The beam path is altered to extend to an opposed plane mirrored surface and the reflected beam is placed in interference with a retained reference beam split from dual-beam source and retroreflected by a reference cube-corner reflector mounted stationary with the interferometer housing. This permits direct measurement of opposed mirror surfaces by laser interferometry while doubling the resolution as with a conventional double-pass plane mirror laser interferometer system
Availability note (English)
U.S. Commissioner of Patents, Washington, D.C. 20231, USA, $.50.Additional details
Additional titles
- Augmented title (English)
- Patent
Publishing Information
- Imprint Pagination
- v p.
- IPC:
- Int. Cl. G01B 9/02.
- IPC
- Int. Cl. G01B 9/02.
- Patent number
- US patent document 4,334,778/A/
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 14788430
- Subject category
- S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Non-conventional Literature
- Descriptors DEI
- BEAM OPTICS; BEAM SPLITTING; BEAMS; CONVERSION; DISPLACEMENT GAGES; DOPPLER EFFECT; HELIUM-NEON LASERS; INTERFEROMETERS; MEASURING METHODS; MIRRORS; POSITIONING; REFLECTION; SURFACES
- Descriptors DEC
- AMPLIFIERS; EQUIPMENT; GAS LASERS; LASERS; MEASURING INSTRUMENTS
Optional Information
- Notes
- PAT-APPL-186870.