Published January 1992 | Version v1
Journal article Metadata-only

Present status of the SORTEC SR Facility

Creators

  • 1. SORTEC Corporation, 16-1, Wadai Tsukuba-shi, Ibaraki 300-42 (Japan)

Description

The status and performance of the SORTEC SR facility is described. Emphasis is placed on the reliable operation and the high performance of the SR source and the status of major systems for x-ray lithography

Additional details

Publishing Information

Journal Title
Review of Scientific Instruments
Journal Volume
63
Journal Issue
1
Series
Rev. Sci. Instrum.
Journal Page Range
1611-1612
ISSN
0034-6748
CODEN
RSINA

Conference

Title
4. international conference on synchrotron radiation instrumentation.
Dates
15-19 Jul 1991.
Place
Chester (United Kingdom).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
23067659
Subject category
S43: PARTICLE ACCELERATORS; S43: PARTICLE ACCELERATORS;
Resource subtype / Literary indicator
Conference
Descriptors DEI
DESIGN; OPERATION; PERFORMANCE; SYNCHROTRON RADIATION SOURCES; USES
Descriptors DEC
RADIATION SOURCES

Optional Information

Secondary number(s)
CONF-910730--.