Spokes and charged particle transport in HiPIMS magnetrons
- 1. Division of Space and Plasma Physics, School of Electrical Engineering, Royal Institute of Technology, SE-100 44 Stockholm (Sweden)
- 2. Laboratoire the Physique de Gaz et Plasmas, UMR 8578 CNRS, Université Paris-Sud XI, 91 405 Orsay Cedex (France)
- 3. Alexandru Ioan Cuza University, Faculty of Physics, Bd. Carol nr 11, Iasi 700506 (Romania)
Description
Two separate scientific communities are shown to have studied one common phenomenon, azimuthally rotating dense plasma structures, also called spokes, in pulsed-power E × B discharges, starting from quite different approaches. The first body of work is motivated by fundamental plasma science and concerns a phenomenon called the critical ionization velocity, CIV, while the other body of work is motivated by the applied plasma science of high power impulse magnetron sputtering (HiPIMS). Here we make use of this situation by applying experimental observations, and theoretical analysis, from the CIV literature to HiPIMS discharges. For a practical example, we take data from observed spokes in HiPIMS discharges and focus on their role in charged particle transport, and in electron energization. We also touch upon the closely related questions of how they channel the cross-B discharge current, how they maintain their internal potential structure and how they influence the energy spectrum of the ions? New particle-in-cell Monte Carlo collisional simulations that shed light on the azimuthal drift and expansion of the spokes are also presented. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/0022-3727/46/8/084005Additional details
Identifiers
Publishing Information
- Journal Title
- Journal of Physics. D, Applied Physics
- Journal Volume
- 46
- Journal Issue
- 8
- Journal Page Range
- [10 p.]
- ISSN
- 0022-3727
- CODEN
- JPAPBE
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 44071923
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- CHARGED-PARTICLE TRANSPORT; ELECTRONS; ENERGY SPECTRA; EXPANSION; IONIZATION; IONS; MAGNETRONS; MONTE CARLO METHOD; PLASMA; SIMULATION; SPUTTERING
- Descriptors DEC
- CALCULATION METHODS; CHARGED PARTICLES; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTARY PARTICLES; EQUIPMENT; FERMIONS; LEPTONS; MICROWAVE EQUIPMENT; MICROWAVE TUBES; RADIATION TRANSPORT; SPECTRA