Multifunctional contamination-resistant coatings

Surface contaminations can critically affect the performance of optical surfaces, in particular with respect to light scattering, optical losses, and laser stability. Thus, avoiding contaminations and reducing contamination-induced effects is of particular interest in the manufacturing of optical systems. By combining a specific thin film design with a tailored structural design, contamination-resistant coatings with a high optical quality can be realized. Most important is the balance of self-cleaningand light scattering-relevant surface roughness components.