Published August 1990
| Version v1
Journal article
Coefficients of solid surface sputtering by light ions
Creators
Description
The formula for calculation of coefficients of solid surface sputtering by light ions in the 10-105 eV energy range, is derived. The formula takes into account the masses and charges of the target atom nucleus and ion, sublimation energy of target surface and parameters of the Born-Mayer interaction between atoms of sputtered target. The formula is based on the model of cascade atom emission
Additional details
Additional titles
- Original title (Russian)
- Коэффициенты распыления поверхности твердых тел легкими ионами
Publishing Information
- Journal Title
- Atomnaya Ehnergiya
- Journal Volume
- 69
- Journal Issue
- 2
- Series
- At. Ehnerg.
- Journal Page Range
- 104-106
- ISSN
- 0004-7163
- CODEN
- AENGA
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- USSR
- INIS RN
- 23038219
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ATOMIC NUMBER; BORN-MAYER EQUATION; ENERGY DEPENDENCE; EV RANGE 10-100; EV RANGE 100-1000; KEV RANGE 01-10; KEV RANGE 10-100; LIGHT IONS; MASS NUMBER; SOLIDS; SPUTTERING; SUBLIMATION; SURFACES
- Descriptors DEC
- CHARGED PARTICLES; ENERGY RANGE; EQUATIONS; EV RANGE; EVAPORATION; IONS; KEV RANGE; PHASE TRANSFORMATIONS