He+ ion induced hydrogen depletion from a-C:H films

We report room temperature He+ ion-beam induced hydrogen depletion from a-C:H films having different microstructures and H concentrations. The films were deposited on crystalline silicon substrates in a parallel plate dc glow discharge plasma reactor. Hydrogen contents of the films were measured by elastic recoil detection analysis (ERDA) technique. The H-depletion data has been explained in terms of a phenomenological model. A strong dependence of H-depletion on the film microstructure and the hydrogen contents, has been observed