Composition and luminescence studies of InGaN epilayers grown at different hydrogen flow rates

Indium gallium nitride (InxGa1−xN) is a technologically important material for many optoelectronic devices, including LEDs and solar cells, but it remains a challenge to incorporate high levels of InN into the alloy while maintaining sample quality. A series of InGaN epilayers was grown with different hydrogen flow rates (0–200 sccm) and growth temperatures (680–750 °C) to obtain various InN fractions and bright emission in the range 390–480 nm. These 160-nm thick epilayers were characterized through several compositional techniques (wavelength dispersive x-ray spectroscopy, x-ray diffraction, Rutherford backscattering spectrometry) and cathodoluminescence hyperspectral imaging. The compositional analysis with the different techniques shows good agreement when taking into account compositional gradients evidenced in these layers. The addition of small amounts of hydrogen to the gas flow at lower growth temperatures is shown to maintain a high surface quality and luminescence homogeneity. This allowed InN fractions of up to ∼16% to be incorporated with minimal peak energy variations over a mapped area while keeping a high material quality. (paper)