Published December 1, 1976
| Version v1
Journal article
Range of heavy ions implanted into solids as measured by He ion backscattering
Creators
- 1. Atomic Energy of Canada Ltd., Chalk River, Ontario. Chalk River Nuclear Labs.
Description
Selected ions ranging in mass from 20Ne to 209Bi were implanted at energies of 120-2000keV using electromagnetic isotope separators. Range profiles of the implants were measured by 4He ion backscattering. The range and range straggling data obtained are compared to theoretical calculations. (Auth.)
Additional details
Identifiers
Publishing Information
- Journal Title
- Nuclear Instruments and Methods
- Journal Volume
- 139
- Series
- Nucl. Instrum. Methods.
- Journal Page Range
- 135-146
- ISSN
- 0029-554X
Conference
- Title
- 9. international conference on electromagnetic isotope separators and related ion accelerators.
- Dates
- 10 - 13 May 1976.
- Place
- Kiryat Anavim, Israel.
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 8308167
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALUMINIUM; BACKSCATTERING; BERYLLIUM; BISMUTH IONS; CARBON; CROSS SECTIONS; DATA; DEPTH DOSE DISTRIBUTIONS; ELECTROMAGNETIC ISOTOPE SEPARA; ERRORS; HEAVY IONS; HELIUM IONS; ION IMPLANTATION; KEV RANGE 100-1000; KRYPTON IONS; MEV RANGE 01-10; RANGE; SILICON; SPECTRA; STOPPING POWER; TUNGSTEN; XENON IONS
- Descriptors DEC
- ALKALINE EARTH METALS; ATOMIC IONS; CHARGED PARTICLES; ELEMENTS; ENERGY RANGE; INFORMATION; IONS; ISOTOPE SEPARATION; KEV RANGE; METALS; MEV RANGE; NONMETALS; RADIATION DOSE DISTRIBUTIONS; SCATTERING; SEMIMETALS; SEPARATION PROCESSES; SPATIAL DOSE DISTRIBUTIONS; TRANSITION ELEMENTS
Optional Information
- Notes
- Updated automatically by Metadata and Full-Text Enrichment Agent