Published January 2, 1999
| Version v1
Journal article
Ceramic surface modification by a keV ion irradiation
Creators
Description
New functional complexes such as AlON and SiON were successfully formed by keV Ar+ ion irradiation with concurrent reactive gas blowing near the irradiated AlN and Si3N4 ceramic surfaces. Single crystal Al2O3 was also treated by only N2+ bombardment. At energies higher than 500 eV, AlON bonding arose, while AlN bonds were formed at 1 keV irradiation
Additional details
Identifiers
- PII
- S0168583X98008489;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 148
- Journal Issue
- 1-4
- Journal Page Range
- p. 740-744
- ISSN
- 0168-583X
- CODEN
- NIMBEU
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Kazakhstan
- INIS RN
- 34024985
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ADHESION; ALUMINIUM NITRIDES; CERAMICS; CHEMICAL BONDS; FILMS; ION BEAMS; IRRADIATION; NITROGEN IONS; SILICON NITRIDES; SURFACE TREATMENTS
- Descriptors DEC
- ALUMINIUM COMPOUNDS; BEAMS; CHARGED PARTICLES; IONS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SILICON COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 1999 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.