Published October 27, 2014 | Version v1
Journal article

Critical boron-doping levels for generation of dislocations in synthetic diamond

  • 1. Departamento de Ciencias de los Materiales e Ingeniería Metalúrgica y Química, Universidad de Cádiz, 11510 Puerto Real, Cádiz (Spain)
  • 2. Université Grenoble Alpes, Institut NEEL, 25 av. des Martyrs, 38042 Grenoble (France)
  • 3. GEMaC, CNRS and Université de Versailles St Quentin, 45 Avenue des États-Unis, 78035 Versailles (France)

Description

Defects induced by boron doping in diamond layers were studied by transmission electron microscopy. The existence of a critical boron doping level above which defects are generated is reported. This level is found to be dependent on the CH4/H2 molar ratios and on growth directions. The critical boron concentration lied in the 6.5–17.0 × 1020at/cm3 range in the 〈111〉 direction and at 3.2 × 1021 at/cm3 for the 〈001〉 one. Strain related effects induced by the doping are shown not to be responsible. From the location of dislocations and their Burger vectors, a model is proposed, together with their generation mechanism.

Additional details

Identifiers

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
105
Journal Issue
17
Journal Page Range
p. 173103-173103.5
ISSN
0003-6951
CODEN
APPLAB

Optional Information

Notes
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