Determination of silicon and nitrogen in silicon nitride by nondestructive neutron activation method

It is suggested to determine the main components of silicon nitride (silicon and nitrogen) by a non-destructive neutron activation method from γ-activity of 28Al and 13N isotopes which form at irradiation of silicon nitride by fast neutrons (14 MeV). A neutron generator with a rotating head and a pneumatic tube is used for irradiation, silicon and nitrogen contents of the samples are calculated by comparison of induced 28Al and 13N activity with the activity of an irradiated sample. The method is much more rapid than already known chemical methods, the standard deviation is not greater than 1-2%. Impurities, which are present in commercial samples of silicon nitride, do not interfere to determine silicon and nitrogen