Published March 1, 2021 | Version v1
Journal article Metadata-only

Force/Displacement MEMS Based on Electromagnetic Field Principle for Tiny Insects Monitoring

Creators

  • 1. Department of Sensoric Systems, Institute of Informatics, Slovak Academy of Sciences, Banska Bystrica (Slovakia)
  • 2. Institute of Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Slovak University of Technology, Bratislava (Slovakia)
  • 3. Department of E-Beam Lithography, Institute of Informatics, Slovak Academy of Sciences, Bratislava (Slovakia)
  • 4. Department of Power Mechanical Engineering, National Tsing Hua University, 30013 Hsinchu, Taiwan (China)

Description

The novel electromagnetic field principle of a wireless measurement of the small displacement (forces) enables its utilization in a wide range of applications. This paper describes the design and fabrication of the physical model of a one-axis force sensor, but together shows possible applications of the proposed wireless electromagnetic field principle for the compact compliant mechanisms or for tiny insects monitoring. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1742-6596/1837/1/012010

Additional details

Identifiers

DOI
10.1088/1742-6596/1837/1/012010;

Publishing Information

Journal Title
Journal of Physics. Conference Series (Online)
Journal Volume
1837
Journal Issue
1
Journal Page Range
[5 p.]
ISSN
1742-6596

Conference

Title
30. Micromechanics and Microsystems Europe Workshop (MME)
Dates
18-20 Aug 2019
Place
Oxford (United Kingdom)

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
54052286
Subject category
S47: OTHER INSTRUMENTATION; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
DESIGN; ELECTROMAGNETIC FIELDS; MEMS; MONITORING; SENSORS