Published February 2009 | Version v1
Journal article

Thin-film patterns directly fabricated using a transfer stamping technique

  • 1. Department of Mechanical Engineering, National Taiwan University, Taipei 106, Taiwan (China)
  • 2. Institute of Polymer Science and Engineering, National Taiwan University, Taipei 106, Taiwan (China)

Description

This paper reports a technique to fabricate thin-film patterns on polymeric substrates. Wet and dry transfer stamping processes are developed for different ink materials. In addition to photoresist, organic conductive polymers are also used as the ink, to be transferred onto a PMMA substrate using the proposed transfer stamping process. The parameters of the transfer stamping process, including pressure, temperature and ink properties, are studied in this paper. Dual-layer patterns have been successfully fabricated, demonstrating the capacity of transfer stamping to fabricate multi-layer components, such as organic thin-film transistor (OTFT). The patterns are also transferred on the metal substrate, which has the potential to be used as an etch mask in the photolithography process, indicating the application of fabricating metal mold with microstructures using a simplified process

Availability note (English)

Available from http://dx.doi.org/10.1088/0960-1317/19/2/025010

Additional details

Identifiers

DOI
10.1088/0960-1317/19/2/025010;
PII
S0960-1317(09)90968-8;

Publishing Information

Journal Title
Journal of Micromechanics and Microengineering. Structures, Devices and Systems
Journal Volume
19
Journal Issue
2
Journal Page Range
[8 p.]
ISSN
0960-1317
CODEN
JMMIEZ

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
44099328
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
LAYERS; METALS; MICROSTRUCTURE; PMMA; RESPIRATORS; SUBSTRATES; THIN FILMS; TRANSISTORS
Descriptors DEC
ELEMENTS; ESTERS; FILMS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; POLYACRYLATES; POLYMERS; POLYVINYLS; SEMICONDUCTOR DEVICES