Thin-film patterns directly fabricated using a transfer stamping technique
Creators
- 1. Department of Mechanical Engineering, National Taiwan University, Taipei 106, Taiwan (China)
- 2. Institute of Polymer Science and Engineering, National Taiwan University, Taipei 106, Taiwan (China)
Description
This paper reports a technique to fabricate thin-film patterns on polymeric substrates. Wet and dry transfer stamping processes are developed for different ink materials. In addition to photoresist, organic conductive polymers are also used as the ink, to be transferred onto a PMMA substrate using the proposed transfer stamping process. The parameters of the transfer stamping process, including pressure, temperature and ink properties, are studied in this paper. Dual-layer patterns have been successfully fabricated, demonstrating the capacity of transfer stamping to fabricate multi-layer components, such as organic thin-film transistor (OTFT). The patterns are also transferred on the metal substrate, which has the potential to be used as an etch mask in the photolithography process, indicating the application of fabricating metal mold with microstructures using a simplified process
Availability note (English)
Available from http://dx.doi.org/10.1088/0960-1317/19/2/025010Additional details
Identifiers
- DOI
- 10.1088/0960-1317/19/2/025010;
- PII
- S0960-1317(09)90968-8;
Publishing Information
- Journal Title
- Journal of Micromechanics and Microengineering. Structures, Devices and Systems
- Journal Volume
- 19
- Journal Issue
- 2
- Journal Page Range
- [8 p.]
- ISSN
- 0960-1317
- CODEN
- JMMIEZ
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 44099328
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- LAYERS; METALS; MICROSTRUCTURE; PMMA; RESPIRATORS; SUBSTRATES; THIN FILMS; TRANSISTORS
- Descriptors DEC
- ELEMENTS; ESTERS; FILMS; ORGANIC COMPOUNDS; ORGANIC POLYMERS; POLYACRYLATES; POLYMERS; POLYVINYLS; SEMICONDUCTOR DEVICES