Evaluation of detection angle change mechanism of high resolution RBS system

A new high resolution RBS (HRBS) system consisting of a magnetic spectrometer and a compact vertical small accelerator is developed. A detection angle change mechanism rotating around Y axis combined a spectrometer, a measurement chamber, a goniometer and a detection chamber is newly designed and installed. In order to evaluate stability and repeatability of a detection angle change mechanism, Si element peak edge channel on a position sensitive detector is measured by using ion beam. Edge position repeatability less than 1 channel for atomic level surface characterization has been performed. (author)