Published September 30, 2009 | Version v1
Journal article Metadata-only

In situ spatial-profile monitoring of beam flux of neutral free radicals produced by photo-deionization of negative ion beams

Creators

  • 1. Graduate School of Engineering, Kanazawa Institute of Technology, 7-1 Ohgigaoka, Nonoichi, Ishikawa 921-8501 (Japan)

Description

Ion-current difference measurement by light intensity modulation (ICD) is introduced as a convenient method to characterize a purified beam of momentum-controlled neutral free radicals produced by photo-deionization of a negative ion beam for the purpose of surface-reaction-selective device processing. The ICD setup developed in this study to estimate the number flux of the photo-deionized neutral particles exhibited the high precision, sensitivity, and spatial resolution.

Availability note (English)

Available from http://dx.doi.org/10.1016/j.apsusc.2009.04.085

Additional details

Identifiers

DOI
10.1016/j.apsusc.2009.04.085;
PII
S0169-4332(09)00431-0;

Publishing Information

Journal Title
Applied Surface Science
Journal Volume
255
Journal Issue
24
Journal Page Range
p. 9581-9584
ISSN
0169-4332
CODEN
ASUSEE

Conference

Title
6. international conference on photo-excited processes and applications
Acronym
6-ICPEPA
Dates
9-12 Sep 2008
Place
Sapporo, Hokkaido (Japan)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
44017834
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ACCURACY; BEAMS; LASER RADIATION; MODULATION; NEUTRAL PARTICLES; RADICALS; SENSITIVITY; SPATIAL RESOLUTION; SURFACES
Descriptors DEC
ELECTROMAGNETIC RADIATION; RADIATIONS; RESOLUTION

Optional Information

Copyright
Copyright (c) 2009 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.