Published April 1991 | Version v1
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The microstructural evolution of nanometer ruthenium films in Ru/C multilayers with thermal treatments

Creators

Description

The evolution of nanometer Ru films sandwiched between various C layer thickness with thermal treatments was studied by plan-view and cross-sectional Transmission Electron Microscopy. Plan-view observation provides information on the Ru grain size, while cross- sectional studies allow examination of the multilayer morphology. After annealing at 800 degrees C for 30 minutes, the grain size in the 2 and 4 nm Ru layers show little difference from each other, while that in the 1 nm Ru layers depends strongly on the thickness of the C layers in the multilayers. It increases with decreasing C layer thickness. Agglomeration of the Ru layers is observed in 1nm Ru/1nm C multilayers after annealing at 600 degrees C for 30 minutes. The evolution of the microstructures and layered structure stability of the Ru/C system is compared to that of W/C and Ru/B4C systems. 10 refs., 2 figs

Availability note (English)

MF available from INIS under the Report Number; OSTI as DE92002269; NTIS; INIS; US Govt. Printing Office Dep.

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Additional details

Publishing Information

Imprint Pagination
13 p.
Report number
LBL--29995

Conference

Title
Spring meeting of the Materials Research Society (MRS).
Dates
29 Apr - 3 May 1991.
Place
Anaheim, CA (United States).

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
23021381
Subject category
S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
BORON CARBIDES; CARBON; FILMS; GRAIN SIZE; HEAT TREATMENTS; LAYERS; MICROSTRUCTURE; RUTHENIUM; TRANSMISSION ELECTRON MICROSCO; TUNGSTEN
Descriptors DEC
BORON COMPOUNDS; CARBIDES; CARBON COMPOUNDS; CRYSTAL STRUCTURE; ELECTRON MICROSCOPY; ELEMENTS; METALS; MICROSCOPY; NONMETALS; PLATINUM METALS; SIZE; TRANSITION ELEMENTS

Optional Information

Contract/Grant/Project number
Contract AC03-76SF00098; Contract F49620-87-K-0001
Funding organization
USDOE, Washington, DC (United States); Department of Defense, Washington, DC (United States).
Secondary number(s)
CONF-910406--35.