Published May 2015 | Version v1
Journal article

Experience on 3D silicon sensors for ATLAS IBL

Creators

  • 1. Istituto Nazionale di Fisica Nucleare—Sezione di Genova, via Dodecaneso 33, 16145 Genova (Italy)

Description

3D silicon sensors, where plasma micro-machining is used to etch deep narrow apertures in the silicon substrate to form electrodes of PIN junctions, represent possible solutions for inner pixel layers of the tracking detectors in high energy physics experiments. This type of sensors has been developed for the Insertable B-Layer (IBL), an additional pixel layer that has been installed in ATLAS during the present shutdown of the LHC collider at CERN. It is presented here the experience in designing, testing and qualifying sensors and detector modules that have been used to equip part of the IBL. Based on the gained experience with 3D silicon sensors for the ATLAS IBL, we discuss possible new developments for the upgrade of ATLAS and CMS at the high-luminosity LHC (HL-LHC)

Availability note (English)

Available from http://dx.doi.org/10.1088/1748-0221/10/05/C05001

Additional details

Publishing Information

Journal Title
Journal of Instrumentation
Journal Volume
10
Journal Issue
05
Journal Page Range
p. C05001
ISSN
1748-0221