Published July 1992 | Version v1
Journal article

Interaction of low energy Ar ions with Al2O3 and MgO surfaces

  • 1. Moskovskij Inzhenerno-Fizicheskij Inst., Moscow (Russian Federation)

Description

Results of experimental and theoretic investigation into Al2O3 and MgO monocrystal surface destruction under effect of low energy (200-1500 eV) argon ion irradiation at 10-5 Torr pressure and 1045 cm-2 dose, are presented. After irradiation metal and oxygen Auger-lines are recorded in the differential mode. The differential spectra obtained are processed using a computer

Additional details

Additional titles

Original title (Russian)
Взаимодействие ионов Ar низких энергий с поверхностью Al

Publishing Information

Journal Title
Izvestiya Akademii Nauk - Rossijskaya Akademiya Nauk. Seriya Fizicheskaya
Journal Volume
56
Journal Issue
7
Journal Page Range
p. 59-63.
ISSN
0367-6765

Conference

Title
10. All-union conference on Ion interaction with surface.
Original Conference Title
Materialy 10. Vsesoyuznoj konferentsii ''Vzaimodejstvie ionov s poverkhnost'yu''
Dates
25 Sep 1991.
Place
Moscow (Russian Federation).

INIS