Published 1975 | Version v1
Book Metadata-only

Comparison of various methods of measuring thin oxide layers formed on molybdenum and titanium

Creators

  • 1. Centre National de la Recherche Scientifique, 45 - Orleans-la-Source (France). Centre de Recherches sur la Chimie de Combustion et des Hautes Temperatures
  • 2. Orleans Univ., 45 (France). Lab. de Chimie des Solides
  • 3. Ecole Normale Superieure, 75 - Paris (France). Groupe de Physique des Solides
  • 4. Universite de Technologie de Compiegne, 60 (France)

Description

The problem of the growth of thin layers is very interesting from both the fundamental and technological viewpoints. This work deals with oxide films produced on two metals, molybdenum and titanium. The thicknesses obtained by various methods (microgravimetry, nuclear reactions and spectrophotometry) are compared and the advantages and disadvantages of each method are shown

Abstract (French)

Le probleme de la croissance des couches minces presente un grand interet sur le plan fondamental et sur le plan technologique. On s'interesse ici au cas des films d'oxyde formes sur deux metaux: le molybdene et le titane. On a compare des resultats d'epaisseur obtenues par diverses methodes (microgravimetrie, reactions nucleaires et spectrophotometrie). On essaie de montrer les inconvenients et les avantages de chacune d'elles

Additional details

Additional titles

Original title (French)
Comparaison de diverses methodes de mesure de film minces d'oxyde formes sur le molybdene et le titane

Publishing Information

Publisher
Societe Francaise du Vide.
Imprint Place
Paris, France
Imprint Title
2. International colloquium on physics and chemistry of surfaces. Brest, May 27-30, 1975
Imprint Pagination
p. 83-87.

Conference

Title
2. International colloquium on physics and chemistry of surfaces.
Dates
27 May 1975.
Place
Brest, France.

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
7247892
Subject category
S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
FILMS; GRAVIMETRY; MOLYBDENUM OXIDES; NUCLEAR REACTION ANALYSIS; SPECTROPHOTOMETRY; THICKNESS; TITANIUM OXIDES
Descriptors DEC
CHALCOGENIDES; CHEMICAL ANALYSIS; DIMENSIONS; MOLYBDENUM COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Notes
Imprint:Suppl. Le Vide les Couches Minces, A, 1975, v. 30.;2. Colloque international de physique et chimie des surfaces. Brest, 27-30 mai 1975.