Hysteresis compensation and trajectory preshaping for piezoactuators in scanning applications

This paper focuses on the dynamics and control of piezoactuators (PEAs) for high-speed large-range scanning applications. Firstly, the nonlinear hysteresis is modeled by using a modified Maxwell resistive capacitor (MRC) model. Secondly, an inverse-based feedforward controller is proposed for this application with hysteresis compensation. Then, the scanning trajectories are preshaped by treating the hysteresis-compensated PEA as a linear system. Finally, experiments are conducted to verify the effectiveness of the proposed approaches. (paper)