Published 2002 | Version v1
Miscellaneous Metadata-only

Influence of thickness on the microstructure and hardness of TiN thin films prepared by cathodic arc vapor deposition

Creators

  • 1. Belarussian State University, Minsk (Belarus)

Description

no abstract available

Part of:
Abstracts of International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2002

Additional details

Publishing Information

Imprint Title
Abstracts of International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2002
Imprint Pagination
174 p.
Journal Page Range
p. 53

Conference

Title
4. International Symposium Ion Implantation and Other Applications of Ions and Electrons, ION 2002
Dates
10-13 Jun 2002
Place
Kazimierz Dolny (Poland)

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
34075118
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract, Conference, Non-conventional Literature
Descriptors DEI
CARBON STEELS; CATHODE SPUTTERING; DEPOSITION; ION BEAMS; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; SURFACE COATING; THICKNESS; TITANIUM IONS; TITANIUM NITRIDES; VICKERS HARDNESS; X-RAY DIFFRACTION
Descriptors DEC
ALLOYS; BEAMS; CARBON ADDITIONS; CHARGED PARTICLES; COHERENT SCATTERING; DEPOSITION; DIFFRACTION; DIMENSIONS; ELECTRON MICROSCOPY; ELEMENTS; IONS; IRON ALLOYS; IRON BASE ALLOYS; MICROSCOPY; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SCATTERING; SEMIMETALS; SPUTTERING; STEELS; TITANIUM COMPOUNDS; TRANSITION ELEMENT ALLOYS; TRANSITION ELEMENT COMPOUNDS

Optional Information