Vacuum condensates on the basis of aluminium and yttrium fluorides

Composition of vacuum condensates prepared by resistive evaporation of materials formed during solid phase sintering of aluminium and yttrium fluorides has been studied. It is ascertained that in this case prevailing evaporation of more volatile ammonium fluoride takes place, which results in the deviation of the condensate composition from composition of evaporated material and gradient of composition over the layer thickness. In the vacuum condensates the presence of metallic aluminium is recorded, which is related to aluminium fluoride dissociation in vapour-gas phase