Effect of incidence angles and manufacturing errors on the imaging performance of hybrid systems

A modified phase function model has been introduced to evaluate the imaging performance of hybrid systems considering the dispersion. In this paper, the effects of incidence angles and manufacturing errors on the performance of hybrid systems are analyzed by an additional phase difference (APD) method based upon the modified phase function model. The analysis results show that the APD augmented with the increase of the incidence angles and the design order, p, the effect of incidence angles on multi-layer diffractive elements is more noticeable than that on single-layer elements, and the lateral manufacturing error depresses badly the performance of hybrid systems for any types of diffractive elements