Published 1999 | Version v1
Miscellaneous Open

Automatic control of an antenna matching network for a helicon plasma source

  • 1. The Australian National University, Canberra, ACT (Australia). Plasma Instrumentation Laboratory

Description

This poster describes the design and operation of an automatic matching network for a Helicon plasma source. The driving point impedance of an antenna used to couple RF power into a Helicon plasma source has a typical resistance of a few ohms and a significant inductive reactance. A matching network is therefore required to match an RF generator with its output impedance of 50 Ohms to the antenna. If the matching network is correctly adjusted the forward power to the plasma is maximised while minimising the power reflected back to the generator

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Part of:
The 22nd AINSE plasma science and technology conference. Conference handbook

Additional details

Publishing Information

Imprint Place
Lucas Heights (Australia)
Imprint Title
The 22nd AINSE plasma science and technology conference. Conference handbook
Imprint Pagination
133 p.
Journal Page Range
p. 115-116
Report number
INIS-AU--0045

Conference

Title
22. AINSE plasma science and technology conference. Plasma'99
Dates
8-9 Feb 1999
Place
Canberra (Australia)

INIS

Optional Information

Notes
Extended abstract. 2 refs., 2 figs.