Published November 1986 | Version v1
Journal article

Properties of NbN-Nb/PbSb tunnel Josephson junctions prepared in a unified vacuum cycle

  • 1. Moskovskij Gosudarstvennyj Univ. (USSR)

Description

Technology for the production of high-quality josephson tunnel junctions with critical current densities 10-103 A/cm2 during formation in unified vacuum cycle of a tunnel barrier over the whole surface of a substrate with subsequent formation of junctions with required dimensions (10x10 μm2), using the methods of ionic etching and explosive photolithography, are described

Additional details

Additional titles

Original title (Russian)
Свойства туннельных Джозефсоновских переходов NbN-Нб/PbSb, изготовленных в едином вакуумном цикле

Publishing Information

Journal Title
Mikroehlektronika
Journal Volume
15
Journal Issue
6
Series
Mikroehlektronika.
Journal Page Range
535-538
ISSN
0544-1269
CODEN
MKETA

Optional Information

Notes
For English translation see the journal Soviet Microelectronics.