Published May 1, 2008
| Version v1
Journal article
XPS study of BNx nanolayers prepared by low pressure rapid thermal annealing in ammonia
- 1. Georgi Nadjakov Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chausee, 1784 Sofia (Bulgaria)
- 2. Institute for Nuclear Research and Nuclear Energy, Bulgarian Academy of Sciences, 72 Tzarigradsko Chausee, 1784 Sofia (Bulgaria)
- 3. Institute of General and Inorganic Chemistry, Bulgarian Academy of Sciences, Acad. G. Bonchev Str. Bl. 11, 1113 Sofia (Bulgaria)
Description
The possibility was examined to prepare BNx layers using rapid thermal annealing of thin B films in NH3 (at four different annealing temperatures and annealing times). X-ray photoelectron spectroscopy (XPS) was employed to investigate the composition and chemical bonds in the films treated. The results show that the amount of nitrogen incorporated into the layers increases with the increase of both the annealing temperature and processing time; a nitrogen/boron atomic concentration ratio of 0.79 was reached by treatment at 1400 deg. C for 180 s
Availability note (English)
Available from http://dx.doi.org/10.1088/1742-6596/113/1/012046Additional details
Identifiers
Publishing Information
- Journal Title
- Journal of Physics. Conference Series (Online)
- Journal Volume
- 113
- Journal Issue
- 1
- Journal Page Range
- [3 p.]
- ISSN
- 1742-6596
Conference
- Title
- 15. international summer school on vacuum, electron and ion technologies
- Acronym
- VEIT 2007
- Dates
- 17-21 Sep 2007
- Place
- Sozopol (Bulgaria)
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 40037102
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- AMMONIA; ANNEALING; BORON; BORON NITRIDES; CHEMICAL BONDS; CONCENTRATION RATIO; LAYERS; NITROGEN; TEMPERATURE DEPENDENCE; THIN FILMS; X-RAY PHOTOELECTRON SPECTROSCOPY
- Descriptors DEC
- BORON COMPOUNDS; DIMENSIONLESS NUMBERS; ELECTRON SPECTROSCOPY; ELEMENTS; FILMS; HEAT TREATMENTS; HYDRIDES; HYDROGEN COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; NITROGEN HYDRIDES; NONMETALS; PHOTOELECTRON SPECTROSCOPY; PNICTIDES; SEMIMETALS; SPECTROSCOPY