Published August 2024
| Version v1
Journal article
Surface analysis and vacuum performance of BeCu alloy materials
- 1. Tokyo Electronics Co., Ltd., Kokubunji, Tokyo (Japan)
- 2. Japan Atomic Energy Agency, Tokai, Ibaraki (Japan)
- 3. Total Support Systems Corporation, Tokai, Ibaraki (Japan)
Description
BeCu material has the characteristics of high thermal conductivity and low thermal emissivity, which can reduce temperature rise. Furthermore, BeCu material is able to reduce the outgassing with the special heat treatment. These characteristics make it easier to get a high vacuum. The surface structure of BeCu material was confirmed by X-ray photoelectron spectroscopy (XPS) analysis, the absorbed gas in the material was measured by thermal desorption spectroscopy (TDS), and the outgassing from the material were measured by a build-up test. These test results confirmed that BeCu material has excellent vacuum properties. (author)
Availability note (English)
Available from DOI: https://doi.org/10.1380/vss.67.393Additional details
Additional titles
- Original title (Japanese)
- BeCu合金材料の表面分析と真空特性
- Augmented title (English)
- BeCu; outgassing; X-ray Photoelectron Spectroscopy (XPS); Thermal Desorption Spectrometry (TDS)
Identifiers
- DOI
- 10.1380/vss.67.393;
Publishing Information
- Journal Title
- Hyomen To Shinku (Online)
- Journal Volume
- 67
- Journal Issue
- 8
- Series
- 雑誌名:表面と真空
- Journal Page Range
- p. 393-398
- ISSN
- 2433-5843
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 56002118
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- BERYLLIUM BASE ALLOYS; BERYLLIUM OXIDES; COPPER; DEGASSING; EMISSIVITY; HEAT TREATMENTS; PRESSURE RANGE MICRO PA; THERMAL CONDUCTIVITY; THERMAL DESORPTION SPECTROSCOPY; VACUUM GAGES; X-RAY PHOTOELECTRON SPECTROSCOPY
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; ALLOYS; BERYLLIUM ALLOYS; BERYLLIUM COMPOUNDS; CHALCOGENIDES; ELECTRON SPECTROSCOPY; ELEMENTS; MEASURING INSTRUMENTS; METALS; OPTICAL PROPERTIES; OXIDES; OXYGEN COMPOUNDS; PHOTOELECTRON SPECTROSCOPY; PHYSICAL PROPERTIES; PRESSURE GAGES; PRESSURE RANGE; SPECTROSCOPY; SURFACE PROPERTIES; THERMODYNAMIC PROPERTIES; TRANSITION ELEMENTS
Optional Information
- Notes
- 7 refs., 13 figs., 1 tab.