Published August 2024 | Version v1
Journal article

Surface analysis and vacuum performance of BeCu alloy materials

  • 1. Tokyo Electronics Co., Ltd., Kokubunji, Tokyo (Japan)
  • 2. Japan Atomic Energy Agency, Tokai, Ibaraki (Japan)
  • 3. Total Support Systems Corporation, Tokai, Ibaraki (Japan)

Description

BeCu material has the characteristics of high thermal conductivity and low thermal emissivity, which can reduce temperature rise. Furthermore, BeCu material is able to reduce the outgassing with the special heat treatment. These characteristics make it easier to get a high vacuum. The surface structure of BeCu material was confirmed by X-ray photoelectron spectroscopy (XPS) analysis, the absorbed gas in the material was measured by thermal desorption spectroscopy (TDS), and the outgassing from the material were measured by a build-up test. These test results confirmed that BeCu material has excellent vacuum properties. (author)

Availability note (English)

Available from DOI: https://doi.org/10.1380/vss.67.393

Additional details

Additional titles

Original title (Japanese)
BeCu合金材料の表面分析と真空特性
Augmented title (English)
BeCu; outgassing; X-ray Photoelectron Spectroscopy (XPS); Thermal Desorption Spectrometry (TDS)

Identifiers

Publishing Information

Journal Title
Hyomen To Shinku (Online)
Journal Volume
67
Journal Issue
8
Series
雑誌名:表面と真空
Journal Page Range
p. 393-398
ISSN
2433-5843

Optional Information

Notes
7 refs., 13 figs., 1 tab.