Published August 1993
| Version v1
Journal article
Thermal and laser-activated CVD: a comparison
Description
Short communication
Additional details
Publishing Information
- Journal Title
- Journal de Physique 4. Colloque
- Journal Volume
- 3
- Journal Issue
- 3
- Journal Page Range
- p. 207.
- ISSN
- 1155-4339
- CODEN
- JPICEI
Conference
- Title
- 9. international conference on chemical vapour deposition (Euro CVD-9).
- Dates
- 22-27 Aug 1993.
- Place
- Tampere (Finland).
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 25021079
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- ALUMINIUM; CARBON; CHEMICAL VAPOR DEPOSITION; COMPARATIVE EVALUATIONS; LASER-RADIATION HEATING; OXIDATION; PHOTOLYSIS; THIN FILMS; TITANIUM CARBIDES; TUNGSTEN
- Descriptors DEC
- CARBIDES; CARBON COMPOUNDS; CHEMICAL COATING; CHEMICAL REACTIONS; DECOMPOSITION; DEPOSITION; ELEMENTS; EVALUATION; FILMS; HEATING; METALS; NONMETALS; PHOTOCHEMICAL REACTIONS; PLASMA HEATING; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS