Published 1989
| Version v1
Journal article
Nitrogen profiling in implanted iron sample by 14N(d,α1)12C reaction
Creators
- 1. Academia Sinica, Beijing, BJ (China). Inst. of Atomic Energy
Description
This paper describes the first use of the 14N(d,α)12C reaction for 14N profiling. The details of the measuring technique used and the results obtained are given. Depth resolution as good as 100 A at sample surface has been achieved. Finally, the 'common view' in the literature concerning the reasons for surface peak formation in the 14N profile curve is briefly discussed. (author)
Additional details
Publishing Information
- Journal Title
- Vacuum
- Journal Volume
- 39
- Journal Issue
- 2-4
- Series
- Vacuum.
- Journal Page Range
- 107-109
- ISSN
- 0042-207X
- CODEN
- VACUA
Conference
- Title
- international symposium on applications of ion beams produced by small accelerators.
- Acronym
- Ion beam interactions with matter
- Dates
- 20-24 Oct 1987.
- Place
- Jinan (China).
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 20055076
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ALPHA PARTICLES; CARBON 12; DEPTH; DEUTERON REACTIONS; ENERGY SPECTRA; ION BEAMS; ION IMPLANTATION; IRON; NITROGEN IONS; NITROGEN 14; NITROGEN 14 TARGET; NUCLEAR REACTION ANALYSIS; SPATIAL DISTRIBUTION
- Descriptors DEC
- BEAMS; CARBON ISOTOPES; CHARGED PARTICLES; CHEMICAL ANALYSIS; DIMENSIONS; DISTRIBUTION; ELEMENTS; EVEN-EVEN NUCLEI; HELIUM IONS; IONIZING RADIATIONS; IONS; ISOTOPES; LIGHT NUCLEI; METALS; NITROGEN ISOTOPES; NONDESTRUCTIVE ANALYSIS; NUCLEAR REACTIONS; NUCLEI; ODD-ODD NUCLEI; RADIATIONS; SPECTRA; STABLE ISOTOPES; TARGETS; TRANSITION ELEMENTS