Two-dimensional 100-nm focusing of hard X-ray with high-precision ellipsoidal mirror
Description
X-ray micro/nano-focusing mirrors employing the total reflection phenomenon are widely utilized as fundamental tools for advanced X-ray microscopic analyses at synchrotron radiation facilities and X-ray free electron laser facilities. Progress of fabrication technologies for high-precision mirror optics is an important subject for study to improve X-ray microscopic analyses. Here, we present a high-precision ellipsoidal mirror which can two-dimensionally focus hard X-rays with a single reflection. By enhancing mirror fabrication technologies including a precision surface finishing method and a surface profiler, an ellipsoidal mirror with a nanometer precision was developed. Focusing properties of the developed ellipsoidal mirror were evaluated at SPring-8. Two-dimensional focus with a beam size of 85 nm x 125 nm in full width at half maximum was demonstrated at an X-ray energy of 7 keV. (author)
Abstract (Japanese)
全反射現象を利用したX線集光光学素子は、最先端のX線顕微分析技術を支えるツールとして、放射光施設やX線自由電子レーザー施設において多用されている。高精度X線光学素子の作製技術の進歩は、顕微分析技術の向上に資する重要なテーマである。本稿では、1回の反射により2次元集光が可能な楕円面ミラーによる硬X線ナノ集光ビームの形成技術の進展について述べる。我々のグループでは、高精度非球面加工法や表面形状計測法などのミラー作製システムを開発することで、従来、作製困難であったナノ精度楕円面集光ミラーを作製した。この楕円面ミラーをSPring-8において評価した結果、7keVのX線において85nmx125nm(半値幅)の2次元集光ビーム形成に成功した。(著者)Additional details
Additional titles
- Original title (Japanese)
- 1枚の楕円面ミラーによる硬X線2次元100 nm集光
Publishing Information
- Journal Title
- Hoshako
- Journal Volume
- 32
- Journal Issue
- 1
- Series
- 雑誌名:放射光
- Journal Page Range
- p. 3-8
- ISSN
- 0914-9287
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 50047680
- Subject category
- S43: PARTICLE ACCELERATORS; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Descriptors DEI
- BEAM LUMINOSITY; BEAM OPTICS; DIFFRACTION; FOCUSING; FREE ELECTRON LASERS; HARD X RADIATION; LIGHT SOURCES; MAGNETRONS; MIRRORS; OPTICAL MICROSCOPY; OPTICAL REFLECTION; SPRING-8 STORAGE RING; SPUTTERING; SYNCHROTRON RADIATION; X-RAY LASERS; X-RAY SPECTROSCOPY
- Descriptors DEC
- BREMSSTRAHLUNG; COHERENT SCATTERING; ELECTROMAGNETIC RADIATION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EQUIPMENT; IONIZING RADIATIONS; LASERS; MICROSCOPY; MICROWAVE EQUIPMENT; MICROWAVE TUBES; RADIATION SOURCES; RADIATIONS; REFLECTION; SCATTERING; SPECTROSCOPY; STORAGE RINGS; SYNCHROTRON RADIATION SOURCES; X RADIATION
Optional Information
- Notes
- 42 refs., 5 figs.