Published 2008
| Version v1
Miscellaneous
Open
Investigation of light element contents in subsurface layers of silicon
Creators
- 1. Frank Laboratory of Neutron Physics, JINR, Dubna (Joint Institute for Nuclear Research (JINR))
- 2. Institute of Electrical Engineering, Slovak Academy of Sciences, Bratislava (Slovakia)
- 3. Institute of Atomic Energy, Otwock-Swierk (Poland)
Description
no abstract available
Files
40107955.pdf
Files
(34.1 kB)
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Additional details
Publishing Information
- Publisher
- Maria Curie-Sklodowska University, Lublin
- Imprint Place
- Lublin (Poland)
- Imprint Title
- Programme and abstracts of the seventh International Conference on Ion Implantation and other Applications of Ions and Electrons (ION 2008)
- Imprint Pagination
- 186 p.
- Journal Page Range
- p. 83
- Report number
- INIS-PL--2009-0011
Conference
- Title
- 7. International Conference on Ion Implantation and other Applications of Ions and Electrons
- Acronym
- ION 2008
- Dates
- 16-19 Jun 2008
- Place
- Kazimierz Dolny (Poland)
INIS
- Country of Publication
- Poland
- Country of Input or Organization
- Poland
- INIS RN
- 40107955
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference
- Descriptors DEI
- HELIUM IONS; ION BEAMS; PHYSICAL PROPERTIES; SCATTERING; SILICON NITRIDES; THIN FILMS
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; FILMS; IONS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SILICON COMPOUNDS