Published 2008 | Version v1
Miscellaneous Open

Investigation of light element contents in subsurface layers of silicon

  • 1. Frank Laboratory of Neutron Physics, JINR, Dubna (Joint Institute for Nuclear Research (JINR))
  • 2. Institute of Electrical Engineering, Slovak Academy of Sciences, Bratislava (Slovakia)
  • 3. Institute of Atomic Energy, Otwock-Swierk (Poland)

Description

no abstract available

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Programme and abstracts of the seventh International Conference on Ion Implantation and other Applications of Ions and Electrons (ION 2008)

Additional details

Publishing Information

Publisher
Maria Curie-Sklodowska University, Lublin
Imprint Place
Lublin (Poland)
Imprint Title
Programme and abstracts of the seventh International Conference on Ion Implantation and other Applications of Ions and Electrons (ION 2008)
Imprint Pagination
186 p.
Journal Page Range
p. 83
Report number
INIS-PL--2009-0011

Conference

Title
7. International Conference on Ion Implantation and other Applications of Ions and Electrons
Acronym
ION 2008
Dates
16-19 Jun 2008
Place
Kazimierz Dolny (Poland)

INIS

Country of Publication
Poland
Country of Input or Organization
Poland
INIS RN
40107955
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
No Abstract, Conference
Descriptors DEI
HELIUM IONS; ION BEAMS; PHYSICAL PROPERTIES; SCATTERING; SILICON NITRIDES; THIN FILMS
Descriptors DEC
BEAMS; CHARGED PARTICLES; FILMS; IONS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SILICON COMPOUNDS

Optional Information