Published December 2005 | Version v1
Journal article

Effect of Si addition on the corrosion resistance of Diamond-Like Carbon (DLC) films

  • 1. Sungkyunkwan University, Suwon (Korea, Republic of)
  • 2. Korea Institute of Science and Technology, Seoul (Korea, Republic of)

Description

Si incorporated diamond-like carbon (Si-DLC) films ranging from 0 to 2 at.% contents were deposited on STS 316L substrates for orthopedic implants by means of r.f. plasma-assisted chemical vapor deposition (r.f. PACVD) technique, using mixtures of benzene (C6H6) and silane (SiH4) as the precursor gases. This study provides the reliable and quantitative data for assessment of the effect of Si incorporation on corrosion property in the simulated body fluid environment through the electrochemical test. It was found that corrosion to resistance of Si-DLC coatings with increasing Si content are improved owing to high sp3 bonding

Additional details

Publishing Information

Journal Title
Corrosion Science and Technology
Journal Volume
4
Journal Issue
6
Series
9 refs, 4 figs, 1 tab
Journal Page Range
p. 226-230
ISSN
1598-6462