Compact superconducting SR apparatus

When the high energy electron beam at the velocity close to that of light is led into a magnetic field, the beam is bent, and very intense light is generated in the tangential direction of the beam track. It is called synchrotron radiation, which has such features that luminance is high, directivity is good, it has the continuous spectrum from X-ray to infrared ray, and it is very short pulses. The competition of the development of compact superconducting SR appratuses which can be installed in semiconductor factories for the high integration of semiconductors has begun. Four compact SR apparatuses have been operated in Japan, and two in U.K. The principle of SR apparatuses is explained. The example of a racetrack type SR ring which was developed by the author is introduced. The parameters of five compact superconducting SR apparatuses which have been operated in Japan and foreign countries at present are listed. The shapes of the SR rings, the energy of incident beam, superconducting magnets and so on are compared. It is desirable that compact superconducting SR apparatuses are put to practical use more widely, and for the purpose, their applications are to be extended by the developments of SR apparatus technology and SR utilization technology. (K.I.)