Retrieval of the complex-valued refractive index of germanium near the M_4,5 absorption edge

The complex-valued index of refraction of germanium in the extreme ultraviolet (XUV) is measured by multiangle reflectance of synchrotron radiation. The resulting index of refraction is higher resolution than previously measured values. It reveals new structures attributed to transitions from the 3d-core orbitals to the ${\text{Σ}}_{5,2}^c$ and the $X_{5,2}^c$ conduction bands. Additionally, it is shown that the problem of total external reflection, which renders multi-angle reflectance measurements insensitive to the complex-valued refractive index at grazing incidence, can be overcome by employing measurements at angles of incidence away from the critical angle.