Microfabrication of dilute magnetic semiconducting Ti1-xCoxO2 films using photosensitive sol-gel method

Photosensitive Ti1-xCoxO2 gel films are prepared by chemical modification with benzoylacetone, and then their Fourier transform infrared spectra and ultraviolet visible spectra are measured. Results show that the chelate rings of benzoylacetone with Ti ions are formed in the Ti1-xCoxO2 gel films. With irradiation of UV light, the chelate rings are photolyzed, which leads to a change of the solubility of the Ti1-xCoxO2 gel films in methanol. Based on this, the micro-patterns of Ti1-xCoxO2 gel films are obtained. After the patterned gel films are dried at 200 oC and are fired at 550 oC for 1 h, negative patterned Ti1-xCoxO2 inorganic films are obtained. The Ti1-xCoxO2 films have an anantase structure and exhibit a room temperature ferromagnetic property.