Published September 1996 | Version v1
Journal article Metadata-only

Effect of ZrOCl2 on InP thermal oxidation

Creators

  • 1. Voronezhskij Gosudarstvennyj Univ., Voronezh (Russian Federation)

Description

Kinetics of InP thermal oxidation, composition and properties of obtained layers were investigated. Mechanism of this process was established. Methods of ultrasoft X-ray spectroscopy and infrared spectroscopy in layers enabled to reveal InPO4, In2O3, P2O5 and unoxidized phosphorus. 9 refs.; 3 figs

Additional details

Additional titles

Original title (Russian)
Воздействие ZrOCl

Publishing Information

Journal Title
Neorganicheskie Materialy
Journal Volume
32
Journal Issue
9
Journal Page Range
p. 1042-1044.
ISSN
0002-337X
CODEN
NEOMB8

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
28056472
Subject category
S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Descriptors DEI
CHEMICAL COMPOSITION; CHEMICAL REACTION KINETICS; FILMS; INDIUM PHOSPHIDES; INFRARED SPECTRA; OXIDATION; OXYCHLORIDES; TEMPERATURE RANGE 0400-1000 K; ZIRCONIUM COMPOUNDS
Descriptors DEC
CHEMICAL REACTIONS; CHLORINE COMPOUNDS; HALOGEN COMPOUNDS; INDIUM COMPOUNDS; KINETICS; OXYGEN COMPOUNDS; OXYHALIDES; PHOSPHIDES; PHOSPHORUS COMPOUNDS; PNICTIDES; REACTION KINETICS; SPECTRA; TEMPERATURE RANGE; TRANSITION ELEMENT COMPOUNDS