Published January 1996 | Version v1
Journal article

On the oxygen atom position in the silicon lattice at high doses of implantation

Description

Short communication

Additional details

Additional titles

Original title (Russian)
Местоположение атомов кислорода в решетке кремния при больших дозах внедрения

Publishing Information

Journal Title
Izvestiya Vysshikh Uchebnykh Zavedenij, Fizika
Journal Volume
39
Journal Issue
1
Journal Page Range
p. 127.
ISSN
0021-3411
CODEN
IVUFAC

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
28003845
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
No Abstract
Descriptors DEI
ATOMS; BACKSCATTERING; HELIUM IONS; INTERSTITIALS; ION IMPLANTATION; OXYGEN; RADIATION DOSES; RESONANCE SCATTERING; SILICON; TETRAGONAL LATTICES
Descriptors DEC
CHARGED PARTICLES; CRYSTAL DEFECTS; CRYSTAL LATTICES; CRYSTAL STRUCTURE; ELEMENTS; INELASTIC SCATTERING; IONS; NONMETALS; POINT DEFECTS; SCATTERING; SEMIMETALS