Published 2012
| Version v1
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Investigation of composition of uncontrolled impurities, their chemical states and distribution profile on semiconductor-metal interface by means of Auger electron spectroscopy and secondary ion mass spectroscopy methods
Creators
- 1. Tashkentskij Gosudarstvennyj Tekhnicheskij Univ. im. Abu Rajkhana Beruni, Tashkent (Uzbekistan)
Description
no abstract available
Files
45105064.pdf
Files
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Additional details
Additional titles
- Original title (Russian)
- Исследование состава неконтролируемых примесей, их химических состояний и профиля распределения на границе раздела полупроводник-металл методами EhOS и VIMS
Publishing Information
- Publisher
- Universitetskaya kniga
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of XLII International Tulinov conference on physics of interactions of charged particles with crystals
- Imprint Pagination
- 222 p.
- Journal Page Range
- p. 93
- Report number
- INIS-RU--536
Conference
- Title
- 42. International Tulinov conference on physics of interactions of charged particles with crystals
- Original Conference Title
- XLII mezhdunarodnaya Tulinovskaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 29-31 May 2012
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 45105064
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- ALUMINIUM; ALUMINIUM OXIDES; AUGER ELECTRON SPECTROSCOPY; CHEMICAL COMPOSITION; DEPTH; EXPERIMENTAL DATA; IMPURITIES; INTERFACES; MASS SPECTROSCOPY; SILICON; SPATIAL DISTRIBUTION; SUBSTRATES; THIN FILMS
- Descriptors DEC
- ALUMINIUM COMPOUNDS; CHALCOGENIDES; DATA; DIMENSIONS; DISTRIBUTION; ELECTRON SPECTROSCOPY; ELEMENTS; FILMS; INFORMATION; METALS; NUMERICAL DATA; OXIDES; OXYGEN COMPOUNDS; SEMIMETALS; SPECTROSCOPY
Optional Information
- Notes
- Imprint:Tezisy dokladov XLII mezhdunarodnoj Tulinovskoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami