Separation of High Energy Nitrogen Ions in a RF Capacitively Coupled Magnetron Activator Used for GaN Plasma-assisted Molecular Beam Epitaxy

Published 2000 | Version v1

Book Metadata-only

1. Ioffe Physico-Technical Institute of Russian Academu of Sciences (Russian Federation)

no abstract available

Additional details

Publisher: Printing Division, Space Research Center, Polish Academy of Sciences, Warsaw, Poland
Imprint Place: Warsaw (Poland)
ISBN: 83-902319-5-6
Imprint Title: 24 International Conference on Phenomena in Ionized Gases Proceedings - Vol. 5
Imprint Pagination: 92 p.
Journal Page Range: p. 31-32

Country of Publication: Poland
Country of Input or Organization: Poland
INIS RN: 33063482
Subject category: S70: PLASMA PHYSICS AND FUSION TECHNOLOGY; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator: Conference, No Abstract
Descriptors DEI: CRYSTAL GROWTH; ELECTRIC FIELDS; EMISSION SPECTRA; GALLIUM NITRIDES; GAS DISCHARGE TUBES; HIGH-FREQUENCY DISCHARGES; LABORATORY EQUIPMENT; MAGNET COILS; MAGNETIC FIELDS; MAGNETRONS; MOLECULAR BEAM EPITAXY; NITROGEN IONS; PHOTOLUMINESCENCE; VISIBLE RADIATION
Descriptors DEC: CHARGED PARTICLES; CRYSTAL GROWTH METHODS; ELECTRIC COILS; ELECTRIC DISCHARGES; ELECTRICAL EQUIPMENT; ELECTROMAGNETIC RADIATION; ELECTRON TUBES; ELECTRONIC EQUIPMENT; EMISSION; EPITAXY; EQUIPMENT; GALLIUM COMPOUNDS; IONS; LUMINESCENCE; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NITRIDES; NITROGEN COMPOUNDS; PHOTON EMISSION; PNICTIDES; RADIATIONS; SPECTRA

Notes: 6 refs, 2 figs
Funding organization: Russian Foundation for Basic Research (Russian Federation); Ministry of Science of Russian Federation (Russian Federation)