Published February 1982 | Version v1
Journal article Metadata-only

Use of molecular beams to support microspheres during plasma coating

Creators

  • 1. Lawrence Livermore National Laboratory, P. O. Box 5508, Livermore, California 94550

Description

Spherical targets can be levitated on beams of Ar or other gas atoms. This is an especially useful technique for supporting microspheres during plasma coating and processing. Measurements of gas flow and pressure indicate that the levitation device operates in the regime of Knudsen's flow. This device is currently being used in the development of future generation laser targets

Additional details

Publishing Information

Journal Title
J. Vac. Sci. Technol.
Journal Volume
20
Journal Issue
2
Series
J. Vac. Sci. Technol.
Journal Page Range
129-133
ISSN
0022-5355

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
13673190
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Descriptors DEI
ARGON; ATOMIC BEAMS; FABRICATION; GASES; KNUDSEN FLOW; LASER RADIATION; LASER TARGETS; LEVITATION; MICROSPHERES; PLASMA; PLASMA ARC SPRAYING; POLYMERS; SPUTTERING; VAPOR DEPOSITED COATINGS
Descriptors DEC
BEAMS; COATINGS; DEPOSITION; ELECTROMAGNETIC RADIATION; ELEMENTS; FLUID FLOW; FLUIDS; GAS FLOW; NONMETALS; RADIATIONS; RARE GASES; SPRAY COATING; SURFACE COATING; TARGETS