Published May 2002 | Version v1
Journal article

Diffusion of Sm and Gd in silicon

  • 1. National University of Uzbekistan, Tashkent (Uzbekistan)

Description

The diffusion properties of Sm and Gd in Si were investigated in a wide temperature range (1100-1250degC) and various annealing environments. The acceptor nature of these impurities was revealed. Their diffusion and mobility parameters were determined. (author)

Additional details

Additional titles

Original title (Russian)
Диффузия самария и гадолиния в кремнии

Publishing Information

Journal Title
Uzbekiston Fizika Zhurnali
Journal Volume
4
Journal Issue
1
Journal Page Range
p. 66-68
ISSN
1025-8817

Optional Information

Notes
1 fig., 1 tab., 12 refs.